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| ’ljÁà–¾ |
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| 1) ƒŒ[ƒU‰ÁH‹@‚Å”|‚Á‚½‚„«ƒT[ƒ{‹Zp“‹Ú‚Å‚¸“x‰ÁH‚ðŽÀŒ» |
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L cut SEMŽÊ^ |
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| 2) ƒ}ƒEƒX‘€ì‚Å‹@ŠBƒIƒyƒŒ[ƒVƒ‡ƒ“‚ª‰Â”\‚ÈÅV‚̃}ƒ“Aƒ}ƒVƒ“ƒCƒ“ƒ^[ƒtƒF[ƒX |
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| Žd —l |
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| € –Ú |
Unit |
LT-1A22E |
| ƒgƒŠƒ~ƒ“ƒO¸“x(R) |
% |
}1 |
| ‰ÁHƒwƒbƒh” |
- |
1 |
| Å‘å‰ÁHƒGƒŠƒA |
mm |
690 „‡ 560 |
| XY޲ ‘‘—‚葬“x |
m/min |
50 |
| ƒgƒŠƒ~ƒ“ƒO‘¬“x |
mm/sec |
~400 |
| ƒ[ƒNŒú‚³ |
mm |
~5 |
| ‰ÁHƒr[ƒ€Œa |
mm |
appro x 0.04 |
| ƒpƒ‹ƒXŽü”g” |
kHz |
0.1~32 |
| ’ïR‘ª’è”ÍˆÍ |
Ħ |
0.01~40M |
| ˆÊ’u¸“x |
mm |
}0.05 |
| ƒ[ƒLƒ“ƒOƒGƒŠƒA |
mm |
80 x 80 |
| ő呬“x |
m/min |
18 |
| Acceleration |
G |
2 |
| ㉺ Probe stroke |
mm |
1 |
| ƒŒ[ƒUƒ^ƒCƒv |
- |
YAG Laser |
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| Ý’u}(Ú×}–ʂ͕ʓr—v¿Šè‚¢‚Ü‚· |
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