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| Ãß°¡¼³¸í |
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| 1)Laser°¡°ø±â ÅëÇØ ±æ·¯Áø °í°¼º ¼º¸±â¼úžÀç·Î °íÁ¤µµ °¡°øÀ» ½ÇÇö |
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L cut SEM»çÁø |
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| 2) ¸¶¿ì½ºÁ¶ÀÛÀ¸·Î ±â°è¿îÀüÀÌ °¡´ÉÇÑ ÃֽŠMan-Machine-Interface |
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| »ç¾ç |
DE-S SERIES:Ç¥ÁØ L/S=25um´ëÀÀ
DE-H SERIES:°íÁ¤µµ L/S=10um ´ëÀÀ |
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| Ç׸ñ |
Unit |
LT-1A22E |
| Trimming Á¤µµ(R) |
% |
¡¾1 |
| °¡°ø Head¼ö |
- |
1 |
| ÃÖ´ë °¡°øArea |
mm |
690  560 |
| XYÃà ÃÖ´ëÀ̼ۼӵµ |
m/min |
50 |
| Trimming ¼Óµµ |
mm/sec |
~400 |
| Work µÎ²² |
mm |
~5 |
| ºö°æ |
mm |
appro x 0.04 |
| ÆÞ½º Á֯ļö |
kHz |
0.1~32 |
| ÀúÇ×ÃøÁ¤ ¹üÀ§ |
§Ù |
0.01~40M |
| À§Ä¡Á¤µµ |
mm |
¡¾0.05 |
| Working area |
mm |
80 x 80 |
| ÃÖ´ë¼Óµµ |
m/min |
18 |
| Acceleration |
G |
2 |
| »óÇÏ Probe stroke |
mm |
1 |
| Laser Type |
- |
YAG Laser |
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| ¼³Ä¡µµ(»ó¼¼µµ¸éÀº º°µµ ¿äÃ»ÇØ ÁֽʽÿÀ) |
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