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| *Additional Information |
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| 1)High-quality, high-precision patterning |
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| High-precision & Repeatability: Machine & Alignment Accuracy |
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| High-quality resolution L/S=10um(DFR thickness:25um) |
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| *Machine specifications |
DE-S SERIES: Standard L/S=20㎛ correspondence
DE-H SERIES: High precision L/S=8㎛ correspondence |
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| Item |
Unit |
DE-3DS |
DE-6UH |
| Imaging size |
mm |
610 x 510 |
← |
| Panel size |
mm |
650 x 550 x t5 |
← |
| Axes |
- |
X, Y, Z and Θ |
← |
| XY Position feedback |
mm |
±0.0001 Linear scale |
| Positioning feedback |
mm |
±0.005 |
±0.003 |
| Panel Fixing |
- |
Vacuum |
← |
| Aligment |
- |
Auto-Alignment[CCD camera] |
| Exposed width |
mm |
258/scan |
255/scan |
| Light Source |
- |
405nm Laser-diode |
← |
| Beam dia. |
mm |
0.01 |
0.0035 |
| CNC Equipment |
- |
H·MARK-30 |
← |
| Input voltage |
V |
Ø3 AC200V, 50Hz±10%
Ø3 AC220V, 60Hz±10% |
| KVA |
14 |
← |
| Air requirement |
KPA |
490~590 |
← |
| ℓ/min |
10 |
← |
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| *Floor Plan |
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Maskless, Beam-overlapping method.